AO_bondedSi.bib

@article{2007ApOpt..46.6793H, 
author = {Jan Haisma and Nico Hattu and J. T. C. M. (Dook) Pulles and Esther Steding and Jan C. G. Vervest}, 
journal = {Appl. Opt.}, 
keywords = {Optical fabrication; Glass and other amorphous materials; Microstructure fabrication},
number = {27}, 
pages = {6793--6803}, 
publisher = {OSA},
title = {Direct bonding and beyond}, 
volume = {46}, 
month = {Sep},
year = {2007},
url = {http://ao.osa.org/abstract.cfm?URI=ao-46-27-6793},
doi = {10.1364/AO.46.006793},
abstract = {We present a number of recent evaluations of direct bonding, a glueless bonding technology, performed under ambient conditions. If combined with bond-strengthening, this geometry-conserving technology is well suited for an application in far ultraviolet immersion lithography. Our term beyond direct bonding refers to taking at least one additional technological step beyond direct bonding, involving chemical interface engineering, advanced silicon-on-insulator(SOI) technology, whereby the unwanted influence of dilatation mismatch is obviated.The combination of successive direct bonding, nanopillar lattice structures and silicon-technological engineering makes it possible for us to arrange quantum dots, wires,and planes in a transversal cascade. We also address the interrelationship between direct bonding and elasticity, as well as plasticity; the latter is in relation to direct bonded glass wafers that are thermally treated to create the geometric shape, e.g.,required for specific lab-on-a-chip components with a three-dimensional overall configuration.},
}

@article{1992JEMat..21..669M,
year={1992},
issn={0361-5235},
journal={Journal of Electronic Materials},
volume={21},
number={7},
doi={10.1007/BF02655594},
title={Wafer bonding technology for silicon-on-lnsulator applications: A review},
url={http://dx.doi.org/10.1007/BF02655594},
publisher={Springer-Verlag},
keywords={Wafer bonding; bonding interface; bonding strength; bubbles; silicon-oninsulator (SOI); polish-stop; etch-stop; micro-cleanroom set-up; crack-opening method},
author={Mitani, Kiyoshi and G\"osele, UlrichM.},
pages={669-676},
language={English}
}

@ARTICLE{1991JaJAP..30..615M,
   author = {{Mitani}, K. and {Lehmann}, V. and {Stengl}, R. and {Feijoo}, D. and 
	{G{\"o}sele}, U.~M. and {Massoud}, H.~Z.},
    title = "{Causes and Prevention of Temperature-Dependent Bubbles in Silicon Wafer Bonding}",
  journal = {Japanese Journal of Applied Physics},
     year = 1991,
    month = apr,
   volume = 30,
    pages = {615},
      doi = {10.1143/JJAP.30.615},
   adsurl = {http://adsabs.harvard.edu/abs/1991JaJAP..30..615M},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@article{doi:10.1080/02786828608959094,
author = {Cooper, Douglas W.},
title = {Particulate Contamination and Microelectronics Manufacturing: An Introduction},
journal = {Aerosol Science and Technology},
volume = {5},
number = {3},
pages = {287-299},
year = {1986},
doi = {10.1080/02786828608959094},
URL = {http://www.tandfonline.com/doi/abs/10.1080/02786828608959094},
eprint = {http://www.tandfonline.com/doi/pdf/10.1080/02786828608959094}
}

@article{2002ApOpt..41.3978K, 
author = {Charalambos C. Katsidis and Dimitrios I. Siapkas}, 
journal = {Appl. Opt.}, 
keywords = {Matrix methods in paraxial optics; Thin films; Roughness; Spectroscopy, infrared; Spectroscopy, semiconductors; Thin films, optical properties},
number = {19}, 
pages = {3978--3987}, 
publisher = {OSA},
title = {General Transfer-Matrix Method for Optical Multilayer Systems with Coherent, Partially Coherent, and Incoherent Interference}, 
volume = {41}, 
month = {Jul},
year = {2002},
url = {http://ao.osa.org/abstract.cfm?URI=ao-41-19-3978},
doi = {10.1364/AO.41.003978},
abstract = {The optical response of coherent thin-film multilayers is often represented with Fresnel coefficients in a 2 {\texttimes} 2 matrix configuration. Here the usual transfer matrix was modified to a generic form, with the ability to use the absolute squares of the Fresnel coefficients, so as to include incoherent (thick layers) and partially coherent (rough surface or interfaces) reflection and transmission. The method is integrated by use of models for refractive-index depth profiling. The utility of the method is illustrated with various multilayer structures formed by ion implantation into Si, including buried insulating and conducting layers, and multilayers with a thick incoherent layer in an arbitrary position.},
}

@ARTICLE{1989JaJAP..28L2141L,
   author = {{Lehmann}, V. and {Mitani}, K. and {Stengl}, R. and {Mii}, T. and 
	{G{\"o}sele}, U.},
    title = "{Bubble-Free Wafer Bonding of GaAs and InP on Silicon in a Microcleanroom}",
  journal = {Japanese Journal of Applied Physics},
     year = 1989,
    month = dec,
   volume = 28,
    pages = {L2141-L2143},
      doi = {10.1143/JJAP.28.L2141},
   adsurl = {http://adsabs.harvard.edu/abs/1989JaJAP..28L2141L},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}


@INPROCEEDINGS{2012SPIE.8444E..1HJ,
   author = {{Johns}, M. and {McCarthy}, P. and {Raybould}, K. and {Bouchez}, A. and 
	{Farahani}, A. and {Filgueira}, J. and {Jacoby}, G. and {Shectman}, S. and 
	{Sheehan}, M.},
    title = "{Giant Magellan Telescope: overview}",
     year = 2012,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 8444,
    month = sep,
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      doi = {10.1117/12.926716},
   adsurl = {http://adsabs.harvard.edu/abs/2012SPIE.8444E..1HJ},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}


@INPROCEEDINGS{2006SPIE.6269E.143J,
   author = {{Jaffe}, D.~T. and {Mar}, D.~J. and {Warren}, D. and {Segura}, P.~R.
	},
    title = "{GMTNIRS: the high resolution near-IR spectrograph for the Giant Magellan Telescope}",
     year = 2006,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 6269,
    month = jul,
      doi = {10.1117/12.672148},
   adsurl = {http://adsabs.harvard.edu/abs/2006SPIE.6269E.143J},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{2010SPIE.7735E..87L,
   author = {{Lee}, S. and {Yuk}, I.-S. and {Lee}, H. and {Wang}, W. and 
	{Park}, C. and {Park}, K.-J. and {Chun}, M.-Y. and {Pak}, S. and 
	{Strubhar}, J. and {Deen}, C. and {Gully-Santiago}, M. and {Rand}, J. and 
	{Seo}, H. and {Kwon}, J. and {Oh}, H. and {Barnes}, S. and {Lacy}, J. and 
	{Goertz}, J. and {Park}, W.-K. and {Pyo}, T.-S. and {Jaffe}, D.~T.
	},
    title = "{GMTNIRS (Giant Magellan Telescope near-infrared spectrograph): design concept}",
     year = 2010,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 7735,
    month = jul,
      eid = {77352K},
      doi = {10.1117/12.857630},
   adsurl = {http://adsabs.harvard.edu/abs/2010SPIE.7735E..87L},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{1986JAP....60.2987S,
   author = {{Shimbo}, M. and {Furukawa}, K. and {Fukuda}, K. and {Tanzawa}, K.
	},
    title = "{Silicon-to-silicon direct bonding method}",
  journal = {Journal of Applied Physics},
 keywords = {CERAMIC BONDING, METAL-METAL BONDING, SILICON, SOLID-SOLID INTERFACES, DIODES, HEAT TREATMENT, LATTICE PARAMETERS, METAL SURFACES, N-TYPE SEMICONDUCTORS, P-TYPE SEMICONDUCTORS},
     year = 1986,
    month = oct,
   volume = 60,
    pages = {2987-2989},
      doi = {10.1063/1.337750},
   adsurl = {http://adsabs.harvard.edu/abs/1986JAP....60.2987S},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{2012SPIE.8450E..2TV,
   author = {{van Amerongen}, A.~H. and {Agocs}, T. and {van Brug}, H. and 
	{Nieuwland}, G. and {Venema}, L. and {Hoogeveen}, R.~W.~M.},
    title = "{Development of silicon immersed grating for METIS on E-ELT}",
     year = 2012,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 8450,
    month = sep,
      eid = {84502T},
      doi = {10.1117/12.925612},
   adsurl = {http://adsabs.harvard.edu/abs/2012SPIE.8450E..2TV},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}


@INPROCEEDINGS{2006SPIE.6273E..77F,
   author = {{Frey}, B.~J. and {Leviton}, D.~B. and {Madison}, T.~J.},
    title = "{Temperature-dependent refractive index of silicon and germanium}",
     year = 2006,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 6273,
   eprint = {arXiv:physics/0606168},
    month = jul,
      doi = {10.1117/12.672850},
   adsurl = {http://adsabs.harvard.edu/abs/2006SPIE.6273E..77F},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{2007ApOpt..46.3400M,
   author = {{Marsh}, J.~P. and {Mar}, D.~J. and {Jaffe}, D.~T.},
    title = "{Production and evaluation of silicon immersion gratings for infrared astronomy}",
  journal = {\ao},
 keywords = {Diffraction gratings, Spectroscopy, infrared, Astronomical optics},
     year = 2007,
    month = jun,
   volume = 46,
    pages = {3400-3416},
      doi = {10.1364/AO.46.003400},
   adsurl = {http://adsabs.harvard.edu/abs/2007ApOpt..46.3400M},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@BOOK{2001opt4.book.....H,
   author = {{Hecht}, E.},
    title = "{Optics 4th edition}",
booktitle = {Optics 4th edition by Eugene Hecht Reading, MA: Addison-Wesley Publishing Company, 2001},
     year = 2001,
publisher = {Addison-Wesley},
   adsurl = {http://adsabs.harvard.edu/abs/2001opt4.book.....H},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@BOOK{2007fuph.book.....S,
   author = {{Saleh}, B.~E.~A. and {Teich}, M.~C.},
    title = "{Fundamentals of Photonics: Second Edition}",
booktitle = {Fundamentals of Photonics: Second Edition, by Bahaa E.~A.~Saleh and Malvin Carl Teich.~ISBN 978-0-471-35832-9.~Published by John Wiley {\amp} Son, Hoboken, NJ, USA, 2007.},
     year = 2007,
publisher = {John Wiley},
   adsurl = {http://adsabs.harvard.edu/abs/2007fuph.book.....S},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{2012SPIE.8450E..2SG,
   author = {{Gully-Santiago}, M. and {Wang}, W. and {Deen}, C. and {Jaffe}, D.
	},
    title = "{Near-infrared metrology of high-performance silicon immersion gratings}",
     year = 2012,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 8450,
    month = sep,
      eid = {84502S},
      doi = {10.1117/12.926434},
   adsurl = {http://adsabs.harvard.edu/abs/2012SPIE.8450E..2SG},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}


@INPROCEEDINGS{1998SPIE.3354..201J,
   author = {{Jaffe}, D.~T. and {Keller}, L.~D. and {Ershov}, O.~A.},
    title = "{Micromachined silicon diffraction gratings for infrared spectroscopy}",
     year = 1998,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 3354,
   editor = {{Fowler}, A.~M.},
    month = aug,
    pages = {201-212},
   adsurl = {http://adsabs.harvard.edu/abs/1998SPIE.3354..201J},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{2010SPIE.7739E.146W,
   author = {{Wang}, W. and {Gully-Santiago}, M. and {Deen}, C. and {Mar}, D.~J. and 
	{Jaffe}, D.~T.},
    title = "{Manufacturing of silicon immersion gratings for infrared spectrometers}",
     year = 2010,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 7739,
    month = jul,
      eid = {77394L},
      doi = {10.1117/12.857164},
   adsurl = {http://adsabs.harvard.edu/abs/2010SPIE.7739E.146W},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}


@INPROCEEDINGS{2010SPIE.7739E.123G,
   author = {{Gully-Santiago}, M. and {Wang}, W. and {Deen}, C. and {Kelly}, D. and 
	{Greene}, T.~P. and {Bacon}, J. and {Jaffe}, D.~T.},
    title = "{High-performance silicon grisms for 1.2-8.0 {$\mu$}m: detailed results from the JWST-NIRCam devices}",
     year = 2010,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 7739,
    month = jul,
      eid = {77393S},
      doi = {10.1117/12.857568},
   adsurl = {http://adsabs.harvard.edu/abs/2010SPIE.7739E.123G},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{2005SPIE.5904...21B,
   author = {{Burriesci}, L.~G.},
    title = "{NIRCam instrument overview}",
     year = 2005,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 5904,
   editor = {{Heaney}, J.~B. and {Burriesci}, L.~G.},
    month = aug,
    pages = {21-29},
      doi = {10.1117/12.613596},
   adsurl = {http://adsabs.harvard.edu/abs/2005SPIE.5904...21B},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{2010SPIE.7735E..54Y,
   author = {{Yuk}, I.-S. and {Jaffe}, D.~T. and {Barnes}, S. and {Chun}, M.-Y. and 
	{Park}, C. and {Lee}, S. and {Lee}, H. and {Wang}, W. and {Park}, K.-J. and 
	{Pak}, S. and {Strubhar}, J. and {Deen}, C. and {Oh}, H. and 
	{Seo}, H. and {Pyo}, T.-S. and {Park}, W.-K. and {Lacy}, J. and 
	{Goertz}, J. and {Rand}, J. and {Gully-Santiago}, M.},
    title = "{Preliminary design of IGRINS (Immersion GRating INfrared Spectrograph)}",
     year = 2010,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 7735,
    month = jul,
      eid = {77351M},
      doi = {10.1117/12.856864},
   adsurl = {http://adsabs.harvard.edu/abs/2010SPIE.7735E..54Y},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{2008SPIE.7014E..77D,
   author = {{Deen}, C.~P. and {Keller}, L. and {Ennico}, K.~A. and {Jaffe}, D.~T. and 
	{Marsh}, J.~P. and {Adams}, J.~D. and {Chitrakar}, N. and {Greene}, T.~P. and 
	{Mar}, D.~J. and {Herter}, T.},
    title = "{A silicon and KRS-5 grism suite for FORCAST on SOFIA}",
     year = 2008,
   series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
   volume = 7014,
    month = aug,
      eid = {70142C},
      doi = {10.1117/12.788565},
   adsurl = {http://adsabs.harvard.edu/abs/2008SPIE.7014E..77D},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{1995ApPhL..67..863G,
   author = {{G{\"o}sele}, U. and {Hopfe}, S. and {Li}, S. and {Mack}, S. and 
	{Martini}, T. and {Reiche}, M. and {Schmidt}, E. and {Stenzel}, H. and 
	{Tong}, Q.-Y.},
    title = "{What determines the lateral bonding speed in silicon wafer bonding?}",
  journal = {Applied Physics Letters},
     year = 1995,
    month = aug,
   volume = 67,
    pages = {863-865},
      doi = {10.1063/1.115530},
   adsurl = {http://adsabs.harvard.edu/abs/1995ApPhL..67..863G},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}


@article{feijoo1994,
   author = "Feijo\`o, Diego and Chabal, Y. J. and Christman, S. B.",
   title = "Silicon wafer bonding studied by infrared absorption spectroscopy",
   journal = "Applied Physics Letters",
   year = "1994",
   volume = "65",
   number = "20", 
   pages = "2548-2550",
   url = "http://scitation.aip.org/content/aip/journal/apl/65/20/10.1063/1.112631",
   doi = "http://dx.doi.org/10.1063/1.112631" 
}

@ARTICLE{1995ApPhA..61..101R,
   author = {{Reiche}, M. and {Hopfe}, S. and {G{\"o}sele}, U. and {Tong}, Q.~Y.
	},
    title = "{Multiple internal reflection spectroscopy of bonded silicon wafers}",
  journal = {Applied Physics A: Materials Science \& Processing},
 keywords = {68.35, 68.55, 78.30, PACS: 68.35, {\amp}thinsp},
     year = 1995,
    month = jul,
   volume = 61,
    pages = {101-105},
      doi = {10.1007/BF01538372},
   adsurl = {http://adsabs.harvard.edu/abs/1995ApPhA..61..101R},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@INPROCEEDINGS{Mitani1990, 
author={Mitani, K. and Lehmann, V. and Gosele, U.}, 
booktitle={Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE}, 
title={Bubble formation during silicon wafer bonding: causes and remedies}, 
year={1990}, 
pages={74-77}, 
keywords={annealing;bubbles in solids;elemental semiconductors;micromechanical devices;silicon;surface topography measurement;200 to 800 degC;IR detection;Si wafers;X-ray topography;annealing;bonding;bubble formation;bubble sizes;interface oxide layers;intermediate temperature range;micromechanical applications;surface contamination;trapped air;wafer flatness;Circuits;Fabrication;Glass;Micromechanical devices;Rough surfaces;Silicon;Surface contamination;Surface roughness;Thermal expansion;Wafer bonding}, 
doi={10.1109/SOLSEN.1990.109824},}

@ARTICLE{2001JAP....89.6013L,
   author = {{Litton}, D.~A. and {Garofalini}, S.~H.},
    title = "{Modeling of hydrophilic wafer bonding by molecular dynamics simulations}",
  journal = {Journal of Applied Physics},
 keywords = {Polishing grinding surface finishing, Structural modeling: serial-addition models computer simulation, Chemisorption/physisorption: adsorbates on surfaces, Langmuir-Blodgett films on solids, polymers on surfaces, biological molecules on surfaces, Adhesion},
     year = 2001,
    month = jun,
   volume = 89,
    pages = {6013-6023},
      doi = {10.1063/1.1351538},
   adsurl = {http://adsabs.harvard.edu/abs/2001JAP....89.6013L},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{2001JOptA...3...85G,
   author = {{Greco}, V. and {Marchesini}, F. and {Molesini}, G.},
    title = "{Optical contact and van der Waals interactions: the role of the surface topography in determining the bonding strength of thick glass plates}",
  journal = {Journal of Optics A: Pure and Applied Optics},
     year = 2001,
    month = jan,
   volume = 3,
    pages = {85-88},
      doi = {10.1088/1464-4258/3/1/314},
   adsurl = {http://adsabs.harvard.edu/abs/2001JOptA...3...85G},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{2000JAP....88.4404H,
   author = {{Han}, W. and {Yu}, J. and {Wang}, Q.},
    title = "{Modeling the dynamics of Si wafer bonding during annealing}",
  journal = {Journal of Applied Physics},
 keywords = {Elemental semiconductors, Kinetics of defect formation and annealing, Other heat and thermomechanical treatments, Other topics in materials science},
     year = 2000,
    month = oct,
   volume = 88,
    pages = {4404-4406},
      doi = {10.1063/1.1308069},
   adsurl = {http://adsabs.harvard.edu/abs/2000JAP....88.4404H},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{1998AnRMS..28..215G,
   author = {{G{\"o}sele}, U. and {Tong}, Q.-Y.},
    title = "{Semiconductor Wafer Bonding}",
  journal = {Annual Review of Materials Science},
     year = 1998,
    month = aug,
   volume = 28,
    pages = {215-241},
      doi = {10.1146/annurev.matsci.28.1.215},
   adsurl = {http://adsabs.harvard.edu/abs/1998AnRMS..28..215G},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@Article{JJAP.37.4197,
  title = {Effect of Surface Roughness on Room-Temperature Wafer Bonding 
by Ar Beam Surface Activation},
  author = {Hideki Takagi and Ryutaro Maeda and Teak~Ryong Chung and Naoe Hosoda and Tadatomo Suga},
  journal = {Japanese Journal of Applied Physics},
  volume = {37},
  number = {Part 1, No. 7A},
  pages = {4197-4203},
  numpages = {6},
  year = {1998},
  url = {http://jjap.jsap.jp/link?JJAP/37/4197/},
  doi = {10.7567/JJAP.37.4197},
  publisher = {The Japan Society of Applied Physics}
}

@ARTICLE{1995ApPhL..67.3614G,
   author = {{G{\"o}sele}, U. and {Stenzel}, H. and {Martini}, T. and {Steinkirchner}, J. and 
	{Conrad}, D. and {Scheerschmidt}, K.},
    title = "{Self-propagating room-temperature silicon wafer bonding in ultrahigh vacuum}",
  journal = {Applied Physics Letters},
     year = 1995,
    month = dec,
   volume = 67,
    pages = {3614-3616},
      doi = {10.1063/1.115335},
   adsurl = {http://adsabs.harvard.edu/abs/1995ApPhL..67.3614G},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{1996ApPhL..68.2222T,
   author = {{Takagi}, H. and {Kikuchi}, K. and {Maeda}, R. and {Chung}, T.~R. and 
	{Suga}, T.},
    title = "{Surface activated bonding of silicon wafers at room temperature}",
  journal = {Applied Physics Letters},
     year = 1996,
    month = apr,
   volume = 68,
    pages = {2222-2224},
      doi = {10.1063/1.115865},
   adsurl = {http://adsabs.harvard.edu/abs/1996ApPhL..68.2222T},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{2000RScI...71.1869G,
   author = {{Gracias}, A.~C. and {Kuranaga}, C. and {Senna}, J.~R. and {Silva}, M.~D.
	},
    title = "{Photoacoustic imaging of voids in direct wafer bonding}",
  journal = {Review of Scientific Instruments},
 keywords = {Semiconductor devices, Thermoacoustics high temperature acoustics photoacoustic effect, Nondestructive testing: ultrasonic testing photoacoustic testing, Composition segregation, defects and impurities},
     year = 2000,
    month = apr,
   volume = 71,
    pages = {1869-1872},
      doi = {10.1063/1.1150553},
   adsurl = {http://adsabs.harvard.edu/abs/2000RScI...71.1869G},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}


@ARTICLE{1996JaJAP..35.2102R,
   author = {{Reiche}, M. and {Hopfe}, S. and {G{\"o}sele}, U. and {Strutzberg}, H. and 
	{Tong}, Q.-Y.},
    title = "{Characterization of Interfaces of Directly Bonded Silicon Wafers: A Comparative Study of Secondary Ion Mass Spectroscopy Multiple Internal Reflection Spectroscopy, and Transmission Electron Microscopy}",
  journal = {Japanese Journal of Applied Physics},
     year = 1996,
    month = apr,
   volume = 35,
    pages = {2102-2107},
      doi = {10.1143/JJAP.35.2102},
   adsurl = {http://adsabs.harvard.edu/abs/1996JaJAP..35.2102R},
  adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

@ARTICLE{1994JaJAP..33....6H,
   author = {{Himi}, H. and {Matsui}, M. and {Fujino}, S. and {Hattori}, T.
	},
    title = "{Silicon Wafer Direct Bonding without Hydrophilic Native Oxides}",
  journal = {Japanese Journal of Applied Physics},
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@ARTICLE{1988JaJAP..27L2364S,
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@proceeding{doi:10.1117/12.323764,
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  abstract = {The current research demonstrates the effectiveness of both silicon and germanium as transmissive materials for use within the far infrared wavelength range of 20 to 160 microns. This study involves samples with a wide range of resistivities and temperatures including: n-type Si of 4000, 2000, 160, 65, 12, and 2.6 ohm-cm and p-type Si of 500 and 60 ohm-cm within a temperature range of -100 degree(s)C to 250 degree(s)C and n-type Ge of 39, 25, 14.5, 5.0, 2.5, and 0.5 ohm-cm within a temperature range of -100 degree(s)C to 100 degree(s)C. Far infrared absorption mechanisms are briefly discussed. The experimental absorption data are used to discuss the interaction between absorption by lattice resonance and free carrier absorption. Highly resistive germanium and silicon are both found to be excellent transmissive materials in the far infrared. These studies may be used to develop the feasibility of silicon and germanium as optical windows or lenses within an extraterrestrial environment.},
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  URL = { http://dx.doi.org/10.1117/12.323764},
  eprint = {}
}

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@article{Masteika2014,
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@BOOK{2013sdmm.book.....I,
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@Book{rasmussen2006gaussian,
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 title = {Gaussian processes for machine learning},
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 year = {2006},
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 }

@MISC{DFMgp,
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title = {Lab section for a course on Gaussian process regression},
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@Article{Hunter:2007,
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  Volume    = {9},
  Number    = {3},
  Pages     = {90--95},
  abstract  = {Matplotlib is a 2D graphics package used for Python
  for application development, interactive scripting, and
  publication-quality image generation across user
  interfaces and operating systems.},
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  year      = 2007
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@Article{PER-GRA:2007,
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  publisher = {IEEE Computer Society},
}