High Performance Si Immersion Gratings Patterned with Electron Beam Lithography
- Michael Gully-Santiago, University of Texas at Austin, Dept. of Astronomy
- Dan Jaffe, University of Texas at Austin, Dept. of Astronomy
- Dan Wilson, NASA JPL Microdevices Laboratory
- Richard Muller, NASA JPL Microdevices Laboratory
There is some finesse required to get this to compile at the moment. I'm using the SPIE template and going from there.
Copyright 2014 by the authors. All rights reserved.