SPIE 2014 paper on e-beam lithography of Si gratings

High Performance Si Immersion Gratings Patterned with Electron Beam Lithography

Authors

• Michael Gully-Santiago, University of Texas at Austin, Dept. of Astronomy
• Dan Jaffe, University of Texas at Austin, Dept. of Astronomy
• Dan Wilson, NASA JPL Microdevices Laboratory
• Richard Muller, NASA JPL Microdevices Laboratory

Compiling

There is some finesse required to get this to compile at the moment. I'm using the SPIE template and going from there.

License

Copyright 2014 by the authors. All rights reserved.